Unconventional lithography for patterned nanomaterials
Li, Yue, Yan, Qingfeng, Koshizaki, NaotoVolume:
28
Language:
english
Journal:
Nanotechnology
DOI:
10.1088/1361-6528/aa98a2
Date:
December, 2017
File:
PDF, 265 KB
english, 2017