Effect of driving frequency on electron heating in...

Effect of driving frequency on electron heating in capacitively coupled RF argon glow discharges at low pressure

Samir, Tagra, Liu, Yue, Zhao, Lu-Lu, Zhou, Yan-Wen
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Volume:
26
Language:
english
Journal:
Chinese Physics B
DOI:
10.1088/1674-1056/26/11/115201
Date:
October, 2017
File:
PDF, 430 KB
english, 2017
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