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Effect of driving frequency on electron heating in capacitively coupled RF argon glow discharges at low pressure
Samir, Tagra, Liu, Yue, Zhao, Lu-Lu, Zhou, Yan-WenVolume:
26
Language:
english
Journal:
Chinese Physics B
DOI:
10.1088/1674-1056/26/11/115201
Date:
October, 2017
File:
PDF, 430 KB
english, 2017