(Invited) Novel Implantation Processing and...

ECS Transactions 2017 / 08 Vol. 80; Iss. 7

(Invited) Novel Implantation Processing and Characterization for Scalable GaN Power Devices

Goorsky, Mark S., Bai, Tingyu, Li, Chao, Tadjer, Marko J., Hobart, Karl D, Anderson, Travis J, Hite, Jennifer K, Feigelson, Boris
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Volume:
80
Language:
english
Journal:
ECS Transactions
DOI:
10.1149/08007.0251ecst
Date:
August, 2017
File:
PDF, 807 KB
english, 2017
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