In situ ellipsometry of Cu surfaces immersed in...

Japanese Journal of Applied Physics 2016 / 06 Vol. 55; Iss. 6S3

In situ ellipsometry of Cu surfaces immersed in benzotriazole–hydrogen peroxide solutions

Kondoh, Eiichi, Kawakami, Tatsuya, Watanabe, Mitsuhiro, Jin, Lianhua, Hamada, Satomi, Shima, Shohei, Hiyama, Hirokuni
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Volume:
55
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.55.06JG03
Date:
June, 2016
File:
PDF, 1.22 MB
english, 2016
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