Simulation of heating of the target during high-power impulse magnetron sputtering
Karzin, V.V., Komlev, A.E., Karapets, K.I., Lebedev, N.K.Volume:
334
Language:
english
Journal:
Surface and Coatings Technology
DOI:
10.1016/j.surfcoat.2017.11.049
Date:
January, 2018
File:
PDF, 780 KB
english, 2018