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Surface band bending and interface alignment of plasma-enhanced atomic layer deposited SiO 2 on Al x Ga 1-x N
Eller, Brianna S., Nemanich, Robert J.Volume:
122
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.5003921
Date:
September, 2017
File:
PDF, 1.01 MB
english, 2017