Low Threading Dislocation Density Aluminum Nitride on Silicon Carbide Through the Use of Reduced Temperature Interlayers
Foronda, Humberto M., Wu, Feng, Zollner, Christian, Esmed Alif, Muhammad, Saifaddin, Burhan, Almogbel, Abdullah, Iza, Michael, Nakamura, Shuji, DenBaars, Steven P., Speck, James S.Language:
english
Journal:
Journal of Crystal Growth
DOI:
10.1016/j.jcrysgro.2017.11.027
Date:
November, 2017
File:
PDF, 1.13 MB
english, 2017