Gas Phase Chemistry of Trimethylboron in Thermal Chemical...

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The Journal of Physical Chemistry C 2017 / 11

Gas Phase Chemistry of Trimethylboron in Thermal Chemical Vapor Deposition

Imam, Mewlude, Souqui, Laurent, Herritsch, Jan, Stegmüller, Andreas, Höglund, Carina, Schmidt, Susann, Hall-Wilton, Richard, Högberg, Hans, Birch, Jens, Tonner, Ralf, Pedersen, Henrik
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Language:
english
Journal:
The Journal of Physical Chemistry C
DOI:
10.1021/acs.jpcc.7b09538
Date:
November, 2017
File:
PDF, 3.46 MB
english, 2017
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