Ion induced crystallization and grain growth of hafnium oxide nano-particles in thin-films deposited by radio frequency magnetron sputtering
Dhanunjaya, M, Khan, S A, Pathak, A P, Avasthi, D K, Nageswara Rao, S V SVolume:
50
Language:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/1361-6463/aa9723
Date:
December, 2017
File:
PDF, 2.62 MB
english, 2017