[AIP ION IMPLANTATION TECHNOLOGY: 16th International...

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[AIP ION IMPLANTATION TECHNOLOGY: 16th International Conference on Ion Implantation Technology - IIT 2006 - Marseille (France) (11-16 June 2006)] AIP Conference Proceedings - Impact of Dose Rate Effects and Damage Engineering on Device Performance

Shim, Kyuha, Hwang, Yeonsang, Lee, Yongseung, An, Jungsoo, Ryu, Seonho, Hahn, Seungho, Cho, Changjune, Hur, Namhae, Guo, Baonian, Liu, Jinning, Erokhin, Yuri
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Volume:
866
Year:
2006
Language:
english
DOI:
10.1063/1.2401480
File:
PDF, 147 KB
english, 2006
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