Precursor gas composition optimisation for large area boron...

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Carbon 2017 / 11

Precursor gas composition optimisation for large area boron doped nano-crystalline diamond growth by MW-LA-PECVD

Taylor, A., Ashcheulov, P., Hubík, P., Klimša, L., Kopeček, J., Remes, Z., Vlčková Živcová, Z., Remzová, M., Kavan, L., Scheid, E., Lorinčík, J., Mortet, V.
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Language:
english
Journal:
Carbon
DOI:
10.1016/j.carbon.2017.11.063
Date:
November, 2017
File:
PDF, 5.70 MB
english, 2017
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