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Qualification of TA6V alloy cleaning processes using supercritical CO 2 cleaning, from coupled SEM, XPS, and TPD analyses
Charton, Sophie, Avril, Ludovic, Besnard, Rémy, Domenichini, BrunoVolume:
36
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.4998345
Date:
March, 2018
File:
PDF, 1.61 MB
english, 2018