Straightforward Integration Flow of a Silicon-Containing...

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ACS Applied Materials & Interfaces 2017 / 11

Straightforward Integration Flow of a Silicon-Containing Block Copolymer for Line–Space Patterning

Legrain, Antoine, Fleury, Guillaume, Mumtaz, Muhammad, Navarro, Christophe, Arias-Zapata, Javier, Chevalier, Xavier, Cayrefourcq, Ian, Zelsmann, Marc
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Language:
english
Journal:
ACS Applied Materials & Interfaces
DOI:
10.1021/acsami.7b12217
Date:
November, 2017
File:
PDF, 4.97 MB
english, 2017
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