[IEEE ESSDERC 2017 - 47th IEEE European Solid-State Device Research Conference (ESSDERC) - Leuven, Belgium (2017.9.11-2017.9.14)] 2017 47th European Solid-State Device Research Conference (ESSDERC) - 200 mm Wafer level graphene transfer by wafer bonding technique
Inac, Mesut, Lupina, Grzegorz, Wietstruck, Matthias, Lisker, Marco, Fraschke, Mirko, Mai, Andreas, Coccetti, Fabio, Kaynakt, MehmetYear:
2017
Language:
english
DOI:
10.1109/ESSDERC.2017.8066630
File:
PDF, 1.04 MB
english, 2017