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Thickness Dependent Parasitic Channel Formation at AlN/Si Interfaces
Chandrasekar, Hareesh, Bhat, K. N., Rangarajan, Muralidharan, Raghavan, Srinivasan, Bhat, NavakantaVolume:
7
Language:
english
Journal:
Scientific Reports
DOI:
10.1038/s41598-017-16114-w
Date:
December, 2017
File:
PDF, 2.68 MB
english, 2017