![](/img/cover-not-exists.png)
MEMS analogous micro-patterning of thermotropic nematic liquid crystalline elastomer films using a fluorinated photoresist and a hard mask process
Ditter, David, Chen, Wei-Liang, Best, Andreas, Zappe, Hans, Koynov, Kaloian, Ober, Christopher K., Zentel, RudolfYear:
2017
Language:
english
Journal:
Journal of Materials Chemistry C
DOI:
10.1039/c7tc03958a
File:
PDF, 2.86 MB
english, 2017