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[ASME ASME 2017 Dynamic Systems and Control Conference - Tysons, Virginia, USA (Wednesday 11 October 2017)] Volume 2: Mechatronics; Estimation and Identification; Uncertain Systems and Robustness; Path Planning and Motion Control; Tracking Control Systems; Multi-Agent and Networked Systems; Manufacturing; Intelligent Transportation and Vehicles; Sensors and Actuators; Diagnostics and Detection; Unmanned, Ground and Surface Robotics; Motion and Vibration Control Applications - Modeling and Control of Surface Quality in Chemical Mechanical Planarization (CMP)
Poosarla, Pavan, Emadi, Hamid, Chandra, Abhijit, Bhattacharya, SourabhYear:
2017
Language:
english
DOI:
10.1115/DSCC2017-5240
File:
PDF, 1.65 MB
english, 2017