Dry Etching with Nanoparticles: Formation of High...

Dry Etching with Nanoparticles: Formation of High Aspect-Ratio Pores and Channels Using Magnetic Gold Nanoclusters

Kadasala, Naveen Reddy, Saei, Mojib, Cheng, Gary J., Wei, Alexander
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Language:
english
Journal:
Advanced Materials
DOI:
10.1002/adma.201703091
Date:
November, 2017
File:
PDF, 2.53 MB
english, 2017
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