Dry Etching with Nanoparticles: Formation of High Aspect-Ratio Pores and Channels Using Magnetic Gold Nanoclusters
Kadasala, Naveen Reddy, Saei, Mojib, Cheng, Gary J., Wei, AlexanderLanguage:
english
Journal:
Advanced Materials
DOI:
10.1002/adma.201703091
Date:
November, 2017
File:
PDF, 2.53 MB
english, 2017