Crosslinkable photoacid generators for ultrahigh loading in...

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 2017 / 11 Vol. 35; Iss. 6

Crosslinkable photoacid generators for ultrahigh loading in epoxide functionalized molecular resists

Narcross, Hannah, Sharp, Brandon L., Tolbert, Laren M., Henderson, Clifford L.
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Volume:
35
Language:
english
Journal:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
DOI:
10.1116/1.4991894
Date:
November, 2017
File:
PDF, 1.55 MB
english, 2017
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