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Robust design of broadband EUV multilayer using multi-objective evolutionary algorithm
Kuang, Shang-qi, Gong, Xue-peng, Yang, Hai-guiVolume:
410
Language:
english
Journal:
Optics Communications
DOI:
10.1016/j.optcom.2017.11.045
Date:
March, 2018
File:
PDF, 1.75 MB
english, 2018