Conductive-AFM topography and current maps simulator for...

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 2015 / 05 Vol. 33; Iss. 3

Conductive-AFM topography and current maps simulator for the study of polycrystalline high-k dielectrics

Couso, Carlos, Porti, Marc, Martin-Martinez, Javier, Iglesias, Vanessa, Nafria, Montserrat, Aymerich, Xavier
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Volume:
33
Language:
english
Journal:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
DOI:
10.1116/1.4915328
Date:
May, 2015
File:
PDF, 2.60 MB
english, 2015
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