Local Arrangement of Substitutional C Atoms and the Thermal...

ECS Journal of Solid State Science and Technology 2017 Vol. 6; Iss. 12

Local Arrangement of Substitutional C Atoms and the Thermal Stability of Epitaxial Si:C(P) Grown by CVD

Dhayalan, Sathish Kumar, Nuytten, Thomas, Loo, Roger, Rosseel, Erik, Hikavyy, Andriy, Shimura, Yosuke, Vandervorst, Wilfried
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Volume:
6
Year:
2017
Language:
english
Journal:
ECS Journal of Solid State Science and Technology
DOI:
10.1149/2.0021712jss
File:
PDF, 558 KB
english, 2017
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