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Thermal study of an indium trisguanidinate as a possible indium nitride precursor
Buttera, Sydney C., Rönnby, Karl, Pedersen, Henrik, Ojamäe, Lars, Barry, Seán T.Volume:
36
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.5002634
Date:
January, 2018
File:
PDF, 1.28 MB
english, 2018