Growth, Defects and Doping of 3C-SiC on Hexagonal Polytypes

ECS Journal of Solid State Science and Technology 2017 Vol. 6; Iss. 10

Growth, Defects and Doping of 3C-SiC on Hexagonal Polytypes

Yakimova, Rositsa, Ivanov, Ivan G., Vines, Lasse, Linnarsson, Margareta K., Gällström, Andreas, Giannazzo, Filippo, Roccaforte, Fabrizio, Wellmann, Peter, Syväjärvi, Mikael, Jokubavicius, Valdas
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Volume:
6
Year:
2017
Language:
english
Journal:
ECS Journal of Solid State Science and Technology
DOI:
10.1149/2.0281710jss
File:
PDF, 871 KB
english, 2017
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