Kinetic investigation of the ion angular distribution in...

Physics of Plasmas 2017 / 11 Vol. 24; Iss. 11

Kinetic investigation of the ion angular distribution in capacitive radio-frequency plasmas

Shihab, Mohammed, Mussenbrock, Thomas
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Volume:
24
Language:
english
Journal:
Physics of Plasmas
DOI:
10.1063/1.4994754
Date:
November, 2017
File:
PDF, 1.82 MB
english, 2017
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