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Optimization of a 2-DOF micro-positioning stage using corrugated flexure units
Wang, Nianfeng, Zhang, Zhiyuan, Zhang, Xianmin, Cui, ChaoyuVolume:
121
Language:
english
Journal:
Mechanism and Machine Theory
DOI:
10.1016/j.mechmachtheory.2017.11.021
Date:
March, 2018
File:
PDF, 2.81 MB
english, 2018