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Role of 1,2,4-Triazole in Co/Cu Removal Rate Selectivity and Galvanic Corrosion during Barrier CMP
Zhang, Wenqian, Liu, Yuling, Wang, Chenwei, Niu, Xinhuan, Ji, Jun, Du, Yichen, Han, LinanVolume:
6
Year:
2017
Language:
english
Journal:
ECS Journal of Solid State Science and Technology
DOI:
10.1149/2.0091712jss
File:
PDF, 1.40 MB
english, 2017