Influence of 100 keV Ar + implantation on electrical and...

Materials Science in Semiconductor Processing 2018 / 03 Vol. 75

Influence of 100 keV Ar + implantation on electrical and optical properties of TiO 2 /Ag/TiO 2 multilayer films

Singh, Satyavir, Sharma, Vikas, Saini, Dinesh, Shekhawat, Surbhi, Asokan, K., Sachdev, Kanupriya
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Volume:
75
Language:
english
Journal:
Materials Science in Semiconductor Processing
DOI:
10.1016/j.mssp.2017.11.016
Date:
March, 2018
File:
PDF, 1.45 MB
english, 2018
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