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ACS Applied Materials & Interfaces 2017 / 12

Atmospheric Pressure Plasma Jet Assisted Synthesis of Zeolite-Based Low-k Thin Films

Huang, Kai-Yu, Chi, Heng-Yu, Kao, Peng-Kai, Huang, Fei-Hung, Jian, Qi-Ming, Cheng, I-Chun, Lee, Wenya, Hsu, Cheng-Che, Kang, Dun-Yen
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Language:
english
Journal:
ACS Applied Materials & Interfaces
DOI:
10.1021/acsami.7b16410
Date:
December, 2017
File:
PDF, 5.97 MB
english, 2017
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