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Time resolved measurements of hydrogen ion energy distributions in a pulsed 2.45 GHz microwave plasma
Megía-Macías, A., Cortázar, O. D., Tarvainen, O., Koivisto, H.Volume:
24
Language:
english
Journal:
Physics of Plasmas
DOI:
10.1063/1.5001488
Date:
November, 2017
File:
PDF, 1.72 MB
english, 2017