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Effect of annealing temperature on Ti/Al/Ni/Au ohmic contacts on undoped AlN films
Li, Xuewei, Zhang, Jicai, Sun, Maosong, Ye, Binbin, Huang, Jun, Xu, Zhenyi, Dong, Wenxiu, Wang, Jianfeng, Xu, KeVolume:
38
Language:
english
Journal:
Journal of Semiconductors
DOI:
10.1088/1674-4926/38/11/116002
Date:
November, 2017
File:
PDF, 3.45 MB
english, 2017