![](/img/cover-not-exists.png)
Laser speckle reduction by a hybrid MEMS diffuser device with continuous height profile
You, Qiaoming, Qiao, Dayong, Song, Xiumin, Xia, Changfeng, Zhang, YananLanguage:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-017-3621-4
Date:
December, 2017
File:
PDF, 1.58 MB
english, 2017