Surface Morphology Evolution Induced by Multiple...

ECS Journal of Solid State Science and Technology 2017 Vol. 6; Iss. 12

Surface Morphology Evolution Induced by Multiple Femtosecond Laser Ablation on 4H-SiC Substrate and Its Application to CMP

Wang, Chengwu, Kurokawa, Syuhei, Doi, Toshiro, Yuan, Julong, Lv, Binghai, Zhang, Kehua
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Volume:
6
Year:
2017
Language:
english
Journal:
ECS Journal of Solid State Science and Technology
DOI:
10.1149/2.0261712jss
File:
PDF, 5.70 MB
english, 2017
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