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Structural and optical properties of Ni-embedded hydrogenated diamond-like carbon (Ni-DLC) prepared by co-deposition of RF-Sputtering and RF-PECVD method
Mohammadinia, Elnaz, Elahi, Seyed Mohammad, Shahidi, SheilaVolume:
74
Language:
english
Journal:
Materials Science in Semiconductor Processing
DOI:
10.1016/j.mssp.2017.10.003
Date:
February, 2018
File:
PDF, 796 KB
english, 2018