Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2015 / 03 Vol. 33; Iss. 2
Promising method toward realization of ultra-low-cost silicon microrod array with nanotip
Yaghootkar, Bahareh, Kahrizi, MojtabaVolume:
33
Language:
english
Journal:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
DOI:
10.1116/1.4913877
Date:
March, 2015
File:
PDF, 2.22 MB
english, 2015