Selective etching of Si, SiGe, Ge and its usage for...

Semiconductors 2017 / 12 Vol. 51; Iss. 12

Selective etching of Si, SiGe, Ge and its usage for increasing the efficiency of silicon solar cells

Baidakova, N. A., Verbus, V. A., Morozova, E. E., Novikov, A. V., Skorohodov, E. V., Shaleev, M. V., Yurasov, D. V., Hombe, A., Kurokawa, Y., Usami, N.
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Volume:
51
Language:
english
Journal:
Semiconductors
DOI:
10.1134/S1063782617120028
Date:
December, 2017
File:
PDF, 488 KB
english, 2017
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