Pulsed DC plasma CVD system for the deposition of DLC films

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Materials Today Communications 2017 / 12

Pulsed DC plasma CVD system for the deposition of DLC films

Mamun, Md Abdullah Al, Furuta, Hiroshi, Hatta, Akimitsu
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Language:
english
Journal:
Materials Today Communications
DOI:
10.1016/j.mtcomm.2017.12.008
Date:
December, 2017
File:
PDF, 1.09 MB
english, 2017
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