Principle and observation of fluorescence moiré fringes for...

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 2017 / 11 Vol. 35; Iss. 6

Principle and observation of fluorescence moiré fringes for alignment in print and imprint methods

Kikuchi, Eri, Ishito, Yota, Matsubara, Shinya, Nakamura, Takahiro, Abe, Masayuki, Nakagawa, Masaru
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Volume:
35
Language:
english
Journal:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
DOI:
10.1116/1.4990844
Date:
November, 2017
File:
PDF, 2.27 MB
english, 2017
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