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Broadband Dielectric Spectroscopic Characterization of Thermal Stability of Low-k Dielectric Thin Films for Micro- and Nanoelectronic Applications
Sunday, Christopher E, Montgomery, Karl R., Amoah, Papa K., Iwuoha, Emmanuel I, Obeng, Yaw S.Volume:
80
Language:
english
Journal:
ECS Transactions
DOI:
10.1149/08001.0253ecst
Date:
August, 2017
File:
PDF, 1.63 MB
english, 2017