Young’s modulus of multi-layer microcantilevers
Deng, Zhikang, Deng, Jinglan, He, Liang, Zhuo, Rongshu, Zhu, Ruiqi, Shi, Yang, Liu, Hui, Yang, Wei, Yuan, Hui, Chen, Yiming, Huang, Yue, Zheng, YiVolume:
7
Language:
english
Journal:
AIP Advances
DOI:
10.1063/1.5011212
Date:
December, 2017
File:
PDF, 4.20 MB
english, 2017