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High-resolution and nondestructive profile measurement by spectral-domain optical coherence tomography with a visible broadband light source for optical-device fabrication
Nishi, Tsuyoshi, Ozaki, Nobuhiko, Oikawa, Yoichi, Miyaji, Kunio, Ohsato, Hirotaka, Watanabe, Eiichiro, Ikeda, Naoki, Sugimoto, YoshimasaVolume:
55
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.55.08RE05
Date:
August, 2016
File:
PDF, 946 KB
english, 2016