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Stress Optimization for a MEMS Multilayer Fixed-Fixed Beam
Haider, Muhammad Luqman, Ullah, Anayat, Ali, BaberVolume:
157
Language:
english
Journal:
Optik - International Journal for Light and Electron Optics
DOI:
10.1016/j.ijleo.2017.11.118
Date:
March, 2018
File:
PDF, 1.16 MB
english, 2018