Laser technologies in micro-optics. Part 1. Fabrication of...

Laser technologies in micro-optics. Part 1. Fabrication of diffractive optical elements and photomasks with amplitude transmission

Veiko, V. P., Korolkov, V. P., Poleshchuk, A. G., Sinev, D. A., Shakhno, E. A.
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Volume:
53
Language:
english
Journal:
Optoelectronics, Instrumentation and Data Processing
DOI:
10.3103/S8756699017050077
Date:
September, 2017
File:
PDF, 438 KB
english, 2017
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