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Disturbance and recovery in high speed (110) cleavage in single crystalline silicon
Zhao, Lv, Wang, Meng, Maynadier, Anne, Nelias, DanielLanguage:
english
Journal:
Journal of the European Ceramic Society
DOI:
10.1016/j.jeurceramsoc.2017.12.035
Date:
December, 2017
File:
PDF, 1.36 MB
english, 2017