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Analysis of shallow depth profiles of titanium nitride and N-implanted titanium by GD-OES: the ‘hydrogen effect’ after the discharge startup and a correction thereof
Weiss, Zdeněk, Vlcak, PetrVolume:
32
Year:
2017
Language:
english
Journal:
Journal of Analytical Atomic Spectrometry
DOI:
10.1039/c7ja00281e
File:
PDF, 873 KB
english, 2017