Electronic structure, excitation properties, and chemical transformations of extreme ultra-violet resist materials
Rangan, Sylvie, Bartynski, Robert A., Narasimhan, Amrit, Brainard, Robert L.Volume:
122
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.4992083
Date:
July, 2017
File:
PDF, 3.81 MB
english, 2017