Out-of-plane dual flexure MEMS piezoresistive accelerometer...

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Microsystem Technologies 2017 / 12

Out-of-plane dual flexure MEMS piezoresistive accelerometer with low cross axis sensitivity

Hari, K., Verma, Satish Kumar, Praveen Krishna, I. R., Seena, V.
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Language:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-017-3679-z
Date:
December, 2017
File:
PDF, 1.50 MB
english, 2017
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