Growth of (111)-oriented epitaxial magnesium silicide...

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Journal of Materials Science 2017 / 12

Growth of (111)-oriented epitaxial magnesium silicide (Mg2Si) films on (001) Al2O3 substrates by RF magnetron sputtering and their properties

Katagiri, Atsuo, Ogawa, Shota, Uehara, Mutsuo, Sankara Rama Krishnan, P. S., Kurokawa, Mao, Matsushima, Masaaki, Shimizu, Takao, Akiyama, Kensuke, Funakubo, Hiroshi
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Language:
english
Journal:
Journal of Materials Science
DOI:
10.1007/s10853-017-1902-z
Date:
December, 2017
File:
PDF, 1.78 MB
english, 2017
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