Effects of Oxygen, Nitrogen and Fluorine on the...

ECS Journal of Solid State Science and Technology 2017 Vol. 6; Iss. 12

Effects of Oxygen, Nitrogen and Fluorine on the Crystallinity of Tungsten by Hot-Wire Assisted ALD

Yang, Mengdi, Aarnink, Antonius A. I., Wolters, Rob A. M., Schmitz, Jurriaan, Kovalgin, Alexey Y.
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Volume:
6
Year:
2017
Language:
english
Journal:
ECS Journal of Solid State Science and Technology
DOI:
10.1149/2.0241712jss
File:
PDF, 770 KB
english, 2017
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