Investigation of mechanical properties of CVD grown...

Applied Physics 2018 / 1 Vol. 124; Iss. 1

Investigation of mechanical properties of CVD grown titanium silicon nitride thin films under reduced atmosphere

Guha, Spandan, Das, Soham, Bandyopadhyay, Asish, Das, Santanu, Swain, Bibhu P.
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Volume:
124
Language:
english
Journal:
Applied Physics A
DOI:
10.1007/s00339-017-1455-7
Date:
January, 2018
File:
PDF, 1.65 MB
english, 2018
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